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Effect of applied dc bias voltage on composition, chemical bonding and mechanical properties of carb
[期刊论文] 作者：LI Hong-xuan XU Tao HAO Jun-yi,
来源：中国有色金属学会会刊：英文版 年份：2004
Carbon nitride films were deposited on Si (100) substrates using plasma-enhanced chemical vapor deposition (PECVD) technique from CH4 and N2 at different applie...
Effect of applied dc bias voltage on composition, chemical bonding and mechanical properties of carb
[期刊论文] 作者：LI Hong-xuan,XU Tao,HAO Jun-yi,
来源：中国有色金属学会会刊（英文版） 年份：2004
Carbon nitride films were deposited on Si (100) substrates using plasma-enhanced chemical vapor deposition (PECVD) technique from CH4 and N2 at different applie...
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