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[期刊论文] 作者:Hany HASSANIN,Khamis ESSA,Amr ELSHAER,Mohamed IMBABY,Heba H.EL-MONGY,Tamer A.EL-SAYED, 来源:先进陶瓷(英文版) 年份:2021
Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear...
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