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Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithograp
[期刊论文] 作者：ZelongZhou,HongboShang,YongxinSui,HuaijiangYang,
来源：ChineseOpticsLetters 年份：2018
Calcium fluoride is widely used in optical lithography lenses and causes retardation that cannot be ignored. However, few studies have been conducted to compensate for the retardation caused by calcium fluoride in optical lithography system......
[期刊论文] 作者：HongboShang,WeiHuang,ChunlaiLiu,WeicaiXu,WangYang,
来源：ChineseOpticsLetters 年份：2013
Analysis of glass homogeneity using the attaching interferometric data model neglects body distribution. To improve analysis accuracy, we establish the three-dimensional gradient index (GRIN) model of glass index by analyzing fused silica h......
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