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Stress behavior at crack tip on thinner silicon chip surface with nanostructures by finite element a
[会议论文] 作者:Meng-Kao Yeh,Chien-Ming Kao,J.Andrew Yeh,Chuck Hsu,
来源:The 5th Asian Conference on Mechanics of Functional Material 年份:2016
Thinning of silicon chip is necessary to save silicon material and to use it more efficiently in solar cell industry.However,the process of thinning silicon...
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