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[期刊论文] 作者：Jae-Wook Kang,Kensuke Kuroda,M,
来源：表面工程材料与先进技术期刊(英文) 年份：2020
Most reports on the fabrication of high-quality Gallium nitride (GaN) are typically based on physical techniques that require very expensive equipment. Therefor...
[会议论文] 作者：Seunghun Lee,Jae-Woon Kim,Chang-Su Kim,Jae-Wook Kang,Jong-Kuk Kim,Do-Geun Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Hydrogen-free amorphous carbon (a-C) films were deposited by a high density plasma assisted sputtering source (HiPASS).The HiPASS transports a high density (＞1013cm-3) Ar plasma from plasma source to...
[会议论文] 作者：Seunghun Lee,Jae-Woon Kim,Chang-Su Kim,Jae-Wook Kang,Jong-Kuk Kim,Do-Geun Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Linear ion sources (LIS) have attractive interests in surface vacuum coating technologies.The LIS emitted ions from a low energy (＜100 eV) to a high energy (＞700 eV)....
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