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[期刊论文] 作者：Jaehong YOON,,
来源：Journal of Iron and Steel Research(International) 年份：2007
Cold-rolled thin strip steel of high flatness quality undergoes multistage deformation during tension leveling. Thus, the parameters of set-up and manipulating...
Comparative Study of Plasma-Enhanced Atomic Layer Deposition Ni by using Two Metallorganic Precursor
[会议论文] 作者：Jaehong Yoon,Woo-Hee Kim,Jungku Song,Hyungjun Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Nickel thin films were deposited by plasma-enhanced atomic layer deposition (PE-ALD) by using metallorganic precursors and various reactant gases,H2 and NH3,inc...
Comparative Study of Plasma-Enhanced Atomic Layer Deposition Ni by using Two Metallorganic Precursor
[会议论文] 作者：Jaehong Yoon,Woo-Hee Kim,Jungku Song,Hyungjun Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Nickel thin films were deposited by plasma-enhanced atomic layer deposition (PE-ALD) by using metallorganic precursors and various reactant gases,H2 and NH3,including its plasma....
The investigation of cobalt film prepared by a plasma enhance atomic layer deposition with a Co(MeCp
[会议论文] 作者：Jusang Park,Han-Bo-Ram Lee,Doyoung Kim,Jaehong Yoon,Clement Lansalot,Julien Gatineau,
来源：等离子体催化与能源材料应用研讨会(ISPCEM2012) 年份：2012
Co thermal or plasma enhanced atomic layer deposition (ALD) using a metal organic precursor,Co(MeCp)2 were investigated from metal organic precursor,Co(MeCp)2,a...
[期刊论文] 作者：Jusang Park,Han-Bo-Ram Lee,Doyoung Kim,Jaehong Yoon,Clement Lansalot,Julien Gatineau,Henri Chevrel,
来源：能源化学 年份：2013
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