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New approaches for overcoming stability issues of silicon TFTs: polymerphous nano-crystalline silico
[会议论文] 作者:MunPyo Hong,Jin-Nyoung Jang,Donghyuk Lee,Hyunwook So,Bonju Lee,
来源:2011年第三届微电子及等离子体技术国际会议 年份:2011
For the application to thin film transistor (TFT) backplane of such flexible active matrix OLEDs with plastic substrates,a novel deposition process for nano-crystalline silicon (nc-Si) thin films at l...
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