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[会议论文] 作者：Koukou Suu,
来源：2012传感器与MEMS技术产业化国际研讨会 年份：2012
Piezoelectric MEMS devices such as acceleration sensor/micro-actuator, have come to be recognized as one of the key enabling technologies for Smartphone. Throug...
[会议论文] 作者：Koukou Suu,
来源：第十二届国际真空冶金与表面工程学术会议(ICVMSE2015) 年份：2015
"Smart society" realized by IoT(Internet of Things),IoE(internet of Everything)requires integration of advanced MEMS/sensor technology and LSI-based ICT(Inf...
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