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[会议论文] 作者：ZHAO Wen-feng,CHEN Jun-fang,LI wei,ZHANG hongbin,MENG ran,LAI xiu-qiong,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
The Si3N4 nanopowder was prepared by means of ICPECVD by decomposing of Sill4 and N2.The ion density in the reaction chamber was diagnosed by a Langrnuir probe.Analysis by FT-IR, TEM and XRD reveals t...
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