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[会议论文] 作者:ZHAO Wen-feng,CHEN Jun-fang,LI wei,ZHANG hongbin,MENG ran,LAI xiu-qiong,
来源:9th Asia-Pacific Conference on Plasma Science and Technology 年份:2008
The Si3N4 nanopowder was prepared by means of ICPECVD by decomposing of Sill4 and N2.The ion density in the reaction chamber was diagnosed by a Langrnuir probe.Analysis by FT-IR, TEM and XRD reveals t...
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