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,A Novel Analytical Approach for Multi-Layer Diaphragm-Based Optical Microelectromechanical-System P
[期刊论文] 作者：LI Ming,WANG Ming,RONG Hua,LI Hong-Pu,
来源：中国物理快报（英文版） 年份：2006
An optical microelectromechanical-system (MEMS) pressure sensor based on multi-layer circular diaphragm is described and analysed by using the proposed novel an...
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