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[期刊论文] 作者:Liang Bo,Ou Qiong-Rong,Liang Yi-Zi,Liang Rong-Qing, 来源:中国物理B(英文版) 年份:2007
In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface mi...
[期刊论文] 作者:Lu Qing-ao,REN Zhao-xing,LIANG Rong-qing,CHENG Shao-yu, 来源:黑龙江科技信息 年份:2001
本文通过对荣华二采区10...
[期刊论文] 作者:LIU Feng,WANG Wei-Wei,CHANG Xi-Jiang,LIANG Rong-Qing, 来源:中国物理快报(英文版) 年份:2011
A dielectric barrier discharge (DBD) lamp is investigated by using sinusoidal power with a 10 kHz frequency in open air at atmospheric pressure.With increasing...
[期刊论文] 作者:HAN Dong,GUO Wen-Kang,XU Ping,LIANG Rong-Qing, 来源:中国物理快报(英文版) 年份:2007
Based on the Chapman-Enskog theory, we calculate the electrical conductivity of non-equilibrium air plasma in the two-temperature model. We consider different d...
[期刊论文] 作者:LIANG Yi-Zi,OU Qiong-Rong,LIANG Bo,LIANG Rong-Qing, 来源:中国物理快报(英文版) 年份:2008
Surface wave plasma (SWP) is an electromagnetic excitation along the planar interface between a dielectric and plasma medium when plasma density is so large tha...
[期刊论文] 作者:Xu Xu,Li Lin-Sen,Liu Feng,Zhou Qian-Hong,Liang Rong-Qing, 来源:中国物理B(英文版) 年份:2008
This paper develops a humped spiral antenna of top inductively coupled plasma with variable gap.Comparing with planar spiral antennas,it investigates the perfor...
[期刊论文] 作者:Qian Xiao-Mei,Wei Yong-Xia,Yu Xiao-Zhu,Ye Chao,Ning Zhao-Yuan,Liang Rong-Qing, 来源:中国物理(英文版) 年份:2007
This paper investigates the effect of O2 plasma treatment on the electric property of Cu/SiCOH low dielectric constant (low-k) film integrated structure. The re...
[期刊论文] 作者:LI Lin-Sen,XU Xu,LIU Feng,ZHOU Qian-Hong,NIE Zong-Fu,LIANG Yi-Zi,LIANG Rong-Qing, 来源:中国物理快报(英文版) 年份:2008
Uniformity of inductively coupled plasma (ICP) is improved with a cone spiral antenna in our experiment. Performance of the ICP with a new type of antenna is ex...
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