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[期刊论文] 作者：HAN Zheng-Fu(韩正甫),LIAO Yan-Lin(廖艳林),ZHOU Hong-Jun(周红军),JIANG Zuo-Hong(蒋作宏),ZHANG Guo-Bin(张国斌),CAO Zhuo-Liang,
来源：中国物理快报（英文版） 年份：2003
A successful direct, etching system excited by a vacuum ultraviolet hollow-cathode lamp is reported. The result shows that the facility can transfer a mesh patt...
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