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[会议论文] 作者：LizhenGao[1]AndrewCornejo[2]WeikeZhang[3]YuzhenLi[3]LiliGao[3]ColinRaston[2]HuiTongChua[1],
来源：ASMDO 2012(Forth International Conference on Multidisciplina 年份：2012
A process with multidisciplinary technology was designed and analysized.This process comprised three systems, i.e.catalytic chemical vapor deposition (CCVD)...
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