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,Preparation of Diamond-Like carbon Films in methane by Electron Cyclotron Resonance Microwave Plasm
[期刊论文] 作者:LI Xin(李新),TANG Zhen-An(唐祯安),MA Guo-Ja(马国佳),WU Zhi-Meng(吴志猛),Deng Xin-Lu(邓新绿),
来源:中国物理快报(英文版) 年份:2003
Diamond-like carbon (DLC) films were prepared on Si (100) substrates by ion implantation from an electron cyclotron resonance microwave plasma source. During th...
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