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Oxidation-based wet-etching method for AlGaN/GaN structure with different oxidation times and temper
[期刊论文] 作者：Yang Liu,Jin-Yan Wang,Zhe Xu,Jin-Bao Cai,Mao-Jun Wang,Min Yu,Bing Xie,
来源：稀有金属（英文版） 年份：2015
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Oxidation-based wet-etching method for Al Ga N/Ga N structure with different oxidation times and tem
[期刊论文] 作者：Yang Liu,Jin-Yan Wang,Zhe Xu,Jin-Bao Cai,Mao-Jun Wang,Min Yu,Bing Xie,Wen-Gang,,
来源：Rare Metals 年份：2015
In this article, a detailed analysis of the wetetching technique for AlGaN/GaN heterostructure using dry thermal oxidation followed by a wet alkali etching was...
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