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Advanced RTP platform for the formation of highly efficient CIGSSe solar modules at significantly re
[会议论文] 作者：Martin F(U)RFANGER,R.VERMA,R.LECHNER,A.WEBER,T.DALIBOR,P.ERAERDS,M.SODE,J.PALM,B.CORD,A.AMRHEIN,
来源：SNEC 第十届(2016)国际太阳能产业及光伏工程(上海)论坛 年份：2016
The research project "CIS-Clustertool" has developed a new operating platform for300×300mm2 glass based substrates.The CIS-Clustertool is set up at the AVANCIS R&D pilotline in Munich,Germany to inves...
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