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[期刊论文] 作者：王芳芳,朱京涛,钟奇,王占山,Philippe Jonnard,Karine Le Guen,Jean-Michel André,Michel Fialin,,
来源：中国物理C 年份：2012
The effect of Ar pressure on the performance of W/Si multilayers is investigated.W/Si multilayers were deposited by a high vacuum DC magnetron sputtering system...
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