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[会议论文] 作者：Lefan Tan,Shuwen Jiang,Yanrong Li,Niandeng Xiong,Ruguan Li,Xiangliang Chen,Yuan Wang,Libin Gao,
来源：第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S 年份：2009
The BST films prepared by RF magnetron sputtering were processed in an O2-plasma treatment system.Experiment results indicate that the leakage currents and dielectric loss of the films were effectivel...
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