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[会议论文] 作者：Hushan Cui,Jianfeng Gao,Guilei Wang,Qiang Xu,Jinjuan Xiang,Yongkui Zhang,Zhiguo Zhao,Jinbao Liu,Peizhen Hong,
来源：2015 Shanghai Thin Film Conference(2015上海薄膜国际会议) 年份：2015
In this talk,processing challenges of CMOS integration of FinFETs with all-last gate stacks and solutions by using novel materials are presented.It is found tha...
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