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[期刊论文] 作者：H.Ehlers,S.Schlichting,C.Schmitz,andD.Ristau,
来源：ChineseOpticsLetters 年份：2010
The challenge in rapid production of high-precision optical coatings is the need to realize a variety of complex coating designs in one process environment. Two approaches to enhance a stable deposition process are presented. First, a virtu......
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