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[期刊论文] 作者:LIU Bo,SONG Zhi-Tang,FENG Song-Lin,CHEN Bomy, 来源:中国物理快报(英文版) 年份:2004
The effect of annealing temperature on crystallization of amorphous Ge2Sb2 Te5 films with thickness of 40 nm is studied by TEM and AFM methods. The relationship...
[期刊论文] 作者:LIU Bo,SONG Zhi-Tang,FENG Song-Lin,CHEN Bomy, 来源:中国物理快报(英文版) 年份:2005
A single nano-cell-element of chalcogenide-random access memory was fabricated by using the focused ion beam method....
[期刊论文] 作者:LIU Bo,SONG Zhi-Tang,FENG Song-Lin,CHEN Bomy, 来源:中国物理快报(英文版) 年份:2004
A single cell element of chalcogenide random access memory was fabricated by using the focused ion beam method. The contact size between the Ge2Sb2 Te5 phase ch...
[期刊论文] 作者:SONG Han,WANG Liang-Yong,LIU Wei-Li,SONG Zhi-Tang, 来源:中国物理快报(英文版) 年份:2013
We investigate the effect of cations with different valences on the chemical mechanical polishing (CMP) of silicon dioxide films.The removal rate and surface ro...
[期刊论文] 作者:LV Shi-Long,SONG Zhi-Tang,ZHANG Ting,FENG Song-Lin, 来源:中国物理快报(英文版) 年份:2008
Si16Sb84-based line cell phase change random access memory (PCRAM), in which the Si16Sb84 phase change line is contacted by TiN electrodes with a nanoscale gap,...
[期刊论文] 作者:GONG Yue-Feng,LING Yun,SONG Zhi-Tang,FENG Song-Lin, 来源:中国物理快报(英文版) 年份:2008
A three-dimensional finite element models for phase change random access memory (PCRAM) is established to simulate thermal and electrical behaviours during RESE...
[期刊论文] 作者:WANG Liang-Yong,LIU Bo,SONG Zhi-Tang,FENG Song-Lin, 来源:中国物理快报(英文版) 年份:2009
We examine the effect of cations in solutions containing benzotriazole (BTA) and H2O2 on copper chemical mechanical polishing (CMP). On the base of atomic force...
[期刊论文] 作者:WANG Liang-Yong,ZHANG Kai-Liang,SONG Zhi-Tang,FENG Song-Lin, 来源:中国物理快报(英文版) 年份:2007
We investigate the effect of chemicals on chemical mechanical polishing (CMP) of glass substrates. Ceria slurry in an ultra-low concentration of 0.25wt.% is use...
[期刊论文] 作者:YAN Wei-Xia,ZHANG Ze-Fang,GUO Xiao-Hui,LIU Wei-Li,SONG Zhi-Tang, 来源:中国物理快报(英文版) 年份:2015
[期刊论文] 作者:Xu Jia-Qing,Liu Bo,Song Zhi-Tang,Feng Song-Lin,Chen Bomy, 来源:中国物理(英文版) 年份:2006
To investigate the reliability of electrode materials for chalcogenide random access memory (C-RAM) applications, the geometry and time evolution of the worm-li...
[期刊论文] 作者:Liu Bo,Song Zhi-Tang,Zhang Ting,Feng Song-Lin,Gan Fu-Xi, 来源:中国物理(英文版) 年份:2004
In this paper, Ag11In12Te26Sb51 phase change semiconductor films have been prepared by dc sputtering. The crystallization behaviour of amorphous Ag11In12Te26Sb5...
[期刊论文] 作者:Liu Bo,Song Zhi-Tang,Zhang Ting,Feng Song-Lin,Chen Bomy, 来源:中国物理(英文版) 年份:2004
Ge2Sb2Te5 film was deposited by RF magnetron sputtering on Si (100) substrate. The structure of amorphous and crystalline Ge2Sb2Te5 thin films was investigated...
[期刊论文] 作者:Yah Wei-Xia,Wang Liang-Yong,Zhang Ze-Fang,Liu Wei-Li,Song Zhi-Tang, 来源:中国物理B(英文版) 年份:2014
[期刊论文] 作者:XIA Ji-Lin,LIU Bo,SONG Zhi-Tang,FENG Song-Lin,CHEN Bomy, 来源:中国物理快报(英文版) 年份:2005
Ag-doped Ge2Sb2 Te5 films were deposited by rf magnetron sputtering on SiO2/Si substrates.The content of Ag ranging from 4.5 to 11.3 at.% is determined by induc...
[期刊论文] 作者:XU Cheng,LIU Bo,SONG Zhi-Tang,FENG Song-Lin,CHEN Bomy, 来源:中国物理快报(英文版) 年份:2005
Sn-doped Ge2Sb2 Te5 thin films deposited on Si(100)/SiO2 substrates by rf magnetron sputtering are investigatedby a differential scanning calorimeter, x-ray dif...
[期刊论文] 作者:CAI Dao-Lin,SONG Zhi-Tang,LI Xi,CHEN Hou-Peng,CHEN Xiao-Gang, 来源:中国物理快报(英文版) 年份:2011
[期刊论文] 作者:FENG Gao-Ming,SONG Zhi-Tang,LIU Bo,FENG Song-Lin,WAN Xu-Dong, 来源:中国物理快报(英文版) 年份:2008
In order to improve the reliability of C-RAM devices, a seamless sub-micro W heating electrode in diameter 260 nm is fabricated with standard 0.18 μm CMOS proc...
[期刊论文] 作者:GONG Yue-Feng,SONG Zhi-Tang,LING Yun,LIU Yan,FENG Song-Lin, 来源:中国物理快报(英文版) 年份:2009
[期刊论文] 作者:GONG Yue-Feng,SONG Zhi-Tang,LING Yun,LIU Yan,LI Yi-Jin, 来源:中国物理快报(英文版) 年份:2010
[期刊论文] 作者:ZHONG Min,SONG Zhi-Tang,LIU Bo,FENG Song-Lin,CHEN Bomy, 来源:中国物理快报(英文版) 年份:2008
In order to improve nano-scale phase change memory performance,a super-clean interface should be obtained after chemical mechanical polishing (CMP) of Ge2Sb2Te5...
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