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[期刊论文] 作者：SUNG In-kyung,KIM Dong-pyo,,
来源：Science in China(Series E:Technological Sciences) 年份：2006
Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as templat...
[期刊论文] 作者：WANG Hao,SUNG In-kyung,LI Xiao,
来源：中国科学E辑（英文版） 年份：2004
Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as templat...
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