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Driving frequency and dual frequency effects on the atmospheric pressure capacitive helium discharge
[会议论文] 作者：Se Youn Moon,D.B.Kim,B.Gweon,W.Choe,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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[会议论文] 作者：Sangho Park,Duksun Han,Se Youn Moon,
来源：13th Asia-Pacific Conference on Plasma Science and Technolog 年份：2016
In general,CF4/Ar/O2 mixture plasma have been wieldy used in semiconductor etching processes.It is required a dedicated and controllable etching technology in CF4/Ar/O2 etching system,but it is not ea...
[会议论文] 作者：Duksun Han,Se Youn Moon,Suk Jae You,
来源：13th Asia-Pacific Conference on Plasma Science and Technolog 年份：2016
In an open air,atmospheric pressure plasma jets operate to apply numerous applications including surface modifications,environmental issues,and bio medicine.Both in research and commercial areas,mostl...
Characteristics of atmospheric pressure plasmas depending on driving frequency in low to radio frequ
[会议论文] 作者：Wonho Choe,Dan Bee Kim,Se Youn Moon,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
In low pressure low temperature plasmas,the dual frequency plasma has been proved to be a very promising way of separate control of electron density and ion energy and producing uniform plasmas over l...
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