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TEM Observation of Si0.99C0.01 Thin Films with Arsenic-Ion-, Boron-Ion-, and Silicon-Ion-Implantatio
[期刊论文] 作者：Junji Yamanaka,Shigenori Inoue,
来源：材料科学与化学工程(英文) 年份：2017
Strained Si and its related materials, such as strained SiGe and strained silicon-carbon alloy (Si-C), are receiving tremendous interest due to their high carri...
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