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[期刊论文] 作者：Quan SHI,Shin KAJITA,Shuyu DAI,Shuangyuan FENG,Noriyasu OHNO,
来源：等离子体科学和技术（英文版） 年份：2021
The formation mechanism of nanocone structure on silicon (Si) surface irradiated by helium plasma has been investigated by experiments and simulations.Impurity...
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