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[期刊论文] 作者:Somayeh Asgary,Amir Hoshang Ramezani, 来源:中国物理快报(英文版) 年份:2017
WNxfilms are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amount...
[期刊论文] 作者:Somayeh Asgary,Amir Hoshang Ramezani,, 来源:Chinese Physics Letters 年份:2017
WN_x films are deposited by reactive chemical vapor deposition at different amounts of nitrogen in gas mixtures.Experimental data demonstrate that nitrogen amou...
[期刊论文] 作者:Somayeh Asgary,Mohammad Reza Hantehzadeh,Mahmood Ghoranneviss,Arash Boochani, 来源:稀有金属(英文版) 年份:2020
Tungsten nitride(WxN)thin films with good crystalline structure,high quality and relatively low resis-tivity were deposited by hot filament chemical vapor depos...
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