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[期刊论文] 作者：Sung James,Sung Michael,
来源：金刚石与磨料磨具工程 年份：2008
More than 1 000 tons of saw diamond grits were consumed worldwide in 2007.Even with such a mature industry,there are still major improvements possible in develo...
[期刊论文] 作者：Sung Michael,Sung James C.,
来源：金刚石与磨料磨具工程 年份：2008
Diamond grits held in metal matrix(sintered or electroplated) are retained primary by mechanical locking.Because of this weak attachment,the pullouts of diamond...
[期刊论文] 作者：Chou Cheng-Shiang,Sung James C.,Pai Yang-Liang,Sung Michael,,
来源：金刚石与磨料磨具工程 年份：2008
Diamond pad conditioners can determine the efficiency of CMP processes and the quality of polished wafers.The polishing rate of a wafer is dependent on the ampl...
[期刊论文] 作者：Hiroshi Ishizuka,Sung James C.,Marehito Aoki,Haedo Jeong,Sung Michael,,
来源：金刚石与磨料磨具工程 年份：2008
Low stress polishing is required for the manufacture of advanced integrated circuits(IC) with node sizes of 45 nm and smaller.However,the CMP community achieved...
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