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Discharge and Plasma Production Characteristics of a Disc Magenetron Operated in DC and Plused Sputt
[会议论文] 作者:T.Ikehata,S.Nemoto,T Ando,
来源:The 11th International Workshop on Plasma-Based Ion Implanta 年份:2011
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Discharge and Plasma Production Characteristics of a Disc Magenetron Operated in DC and Plused Sputt
[会议论文] 作者:T.Ikehata,S.Nemoto,T Ando,
来源:The 11th International Workshop on Plasma-Based Ion Implanta 年份:2011
...
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