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[会议论文] 作者:Jung,T. Jung,D.G Lim,J. Heo,W. S. Choi,
来源:2011年第三届微电子及等离子体技术国际会议 年份:2011
Carbon-based thin film has been studied in various fields because this film has high hardness,low wear rate,low friction coefficient,lubrication performance,electrical resistance,chemical inertness,an...
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