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[会议论文] 作者：Vincent Xu,
来源：第四届微米纳米技术“创新与产业化”国际研讨会暨物联网MEMS产业应用论坛 年份：2010
In the past 30 year, micromachined acceleroemters, gyroscope and pressure sensors were mainly used in Automotive, Industry and Medical markets.These physica...
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