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[会议论文] 作者：Volker Herbig,
来源：第四届微米纳米技术“创新与产业化”国际研讨会暨物联网MEMS产业应用论坛 年份：2010
MEMS Foundry Services for High-Volume MEMS Applications MEMS sensors increasingly are being used in electronic applications to sense the world around us, and more uses are being discovered every day.W...
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