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[会议论文] 作者:W CLang,J Q Xiao,J Gong,C Sun,R F Huang,L S Wen, 来源:第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S 年份:2009
Macroparticles (MPs) reduction is the main subject in the process of arc ion plating and there are many process parameters affect the MPs distribution on the resultant films.However,the effects of pro...
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