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[期刊论文] 作者：CHENXi-ming,SUNLian-jie,YANGBao-he,GUOYan,WUXiao-guo,
来源：OptoelectronicsLetters 年份：2012
Boron nitride (BN) films for high-frequency surface acoustic wave (SAW) devices are deposited on Ti/Al/Si(111) wafers by radio frequency (RF) magnetron sputtering. The structure of BN films is investigated by Fourier transform infrared (FTI......
[期刊论文] 作者：YINJu-qian,CHENXi-ming,YANGBao-he,ZHANGQian,WUXiao-guo,
来源：OptoelectronicsLetters 年份：2012
The preparation of aluminum nitrogen (AlN) film without Al texture is of great significance for the manufacture of highperformance surface acoustic wave (SAW) device. We research the process factors which bring Al into AlN film due to radio......
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