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[期刊论文] 作者：Wang De-Zhen(王德真),Wu Hong-Tao(吴洪涛),
来源：中国物理（英文版） 年份：2002
The radial distributions of ions, electrons and dust particles in the positive column of glow discharges are inves-tigated in a triple-pole diffusion model. The...
,Two-dimensional temperature distribution inside a hemispherical bowl-shaped target for plasma sourc
[期刊论文] 作者：Liu Cheng-Sen(刘成森),Wang Yan-Hui(王艳辉),Wang De-Zhen(王德真),
来源：中国物理（英文版） 年份：2005
One important parameter for the plasma source ion implantation (PSII) process is the target temperature obtained during the surface modification. Because the po...
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