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Effect of gas pressure on ion energy at substrate side of Ag target radio-frequency and very-high-fr
[期刊论文] 作者：Weichen NI,Chao YE,Yiqing YU,Xiangying WANG,
来源：等离子体科学和技术（英文版） 年份：2022
The effect of gas pressure on ion energy distribution at the substrate side of Ag target radio-frequency(RF)and very-high-frequency(VHF)magnetron sputtering discharge was investigated.At lower pressure,the evolution of maximum ion energy(E)......
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