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A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructur
[期刊论文] 作者：QIAN Liang,YANG ZhenChuan,YAN GuiZhen,,
来源：Science China(Information Sciences) 年份：2014
We report a CMOS compatible bulk micromachining method for the integration of high-aspectratio single crystal silicon MEMS(micro electromechanical systems)devic...
[期刊论文] 作者：YANG ZhenChuan,WEI YuMin,MAO Xu,YAN GuiZhen,,
来源：Science China(Technological Sciences) 年份：2013
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices is presented,which takes advantage of the lag effect in silicon DRIE(dee...
[期刊论文] 作者：DING HaiTao,YANG ZhenChuan,WANG ZhanFei,KRAFT Michael,YAN GuiZhen,,
来源：Science China(Information Sciences) 年份：2013
This paper presents a MEMS gyroscope control system of using a high-order band-pass continuoustime sigma-delta modulator.Compared with a low-pass discrete-time...
[期刊论文] 作者：HE ChunHua,ZHAO QianCheng,LIU YuXian,YANG ZhenChuan,YAN GuiZhen,,
来源：Science China(Technological Sciences) 年份：2013
This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes.Specific theoretical deductions ar...
[期刊论文] 作者：TAO TingTing,LU WenGao,FANG Ran,ZHANG YaCong,CHEN ZhongJian,YAN GuiZhen,,
来源：Science China(Information Sciences) 年份：2014
In this paper, a micromachined gyroscope system composed of a vibratory gyroscope with its interface ASIC is presented. The system adopts a DC sensing method to...
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