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[期刊论文] 作者：JIANG Ai-hua,XIAO Jian-rong,YANG Duan-cui,JIANG Hao-yu,,
来源：Journal of Iron and Steel Research(International) 年份：2012
Nitrogen doped fluorinated amorphous carbon thin films(a-C:N:F)were prepared by radio frequency plasma enhanced chemical vapor deposition(rf-PECVD)under differe...
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