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[期刊论文] 作者：DingJianning,YangJichang,WenSh,
来源：固体力学学报：英文版 年份：2005
In order to accomplish reliable mechanical design of MEMS, the influences of surface roughness and octadecyltrichlorosilane (OTS) self-assembled monolayers (SAM...
[期刊论文] 作者：DingJianning,YangJichang,WenSh,
来源：固体力学学报：英文版 年份：2004
The bending strength of microfabricated polysilicon beams was measured by beam bending using a nanoindenter. Also, the tensile strength of microfabricated polys...
[期刊论文] 作者：CHENWei，YANGJichang，WUXiaofeng,
来源：机械工程前沿 年份：2007
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