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[会议论文] 作者：Kai Yan,Wenqing Yao,Jiangli Cao,Yunshuang Li,Yanxue Wu,
来源：中国真空学会2014年年会 年份：2014
Au/Cu system is widely used in the semiconductor industries and many other felds(including micro-electromechanical systems,MEMS)[1].As an electronic component,it is applied in the spacecrafts and work...
[会议论文] 作者：Yanxue Wu,Wenqing Yao,Xiongyao Li,Yang Li,Kai Yan,
来源：中国真空学会2014年年会 年份：2014
Auger electron spectroscopy(AES)is widely used in surface analysis of metal material and semiconductor materials.Due to charged effect of geological samples,the use of auger electron spectroscopy in g...
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