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Spatial evolutions of the electron energy distributions in a weakly magnetized solenoidal-type induc
[会议论文] 作者：Young-Do Kim,Young-Kwang Lee,Hyo-Chang Lee,Chin-Wook Chung,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
The electron energy distributions (EEDs) were measured in solenoidal-type inductively coupled plasma (ICP) under a weak DC magnetic field with an axial direction.As the DC magnetic field increases at...
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