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Simulation of nanoparticle transport dynamics in two-dimensional capacitively-coupled SiH4 discharge
[会议论文] 作者：Xiang-Mei Liu,Yuan-Hong Song,You-Nian Wang,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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[会议论文] 作者：Yuan-Hong Song,Shu-Yan You,You-Nian Wang,
来源：9th International Conference on Computer Siumlaation of Radi 年份：2008
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[会议论文] 作者：Chun-Zhi Li,Yuan-Hong Song,You-Nian Wang,
来源：9th International Conference on Computer Siumlaation of Radi 年份：2008
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Electromagnetic effects on growth and transport of dust particles in VHF capacitively coupled silane
[会议论文] 作者：Xiang-Mei Liu,Yuan-Hong Song,You-Nian Wang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Dust particles have been observed in thin film deposition,etching and other surface modification in microelectronics and nanotechnology processes....
Electromagnetic effects on growth and transport of dust particles in VHF capacitively coupled silane
[会议论文] 作者：Xiang-Mei Liu,Yuan-Hong Song,You-Nian Wang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Dust particles have been observed in thin film deposition,etching and other surface modification in microelectronics and nanotechnology processes....
,Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensiona
[期刊论文] 作者：Xiang-Mei Liu,Yuan-Hong Song,Wei Jiang,Wen-Zhu Jia,
来源：中国物理快报（英文版） 年份：2018
A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges.The n...
[会议论文] 作者：Yong-Xin Liu,Wen-Qi Lu,Yuan-Hong Song,You-Nian Wang,Quan-Zhi Zhang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
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[会议论文] 作者：Zhang-Hu Hu,Yuan-Hong Song,Z.L. Mi(s)ovi,You-Nian Wang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
A two-dimensional particle-in-cell method is adopted to investigate the dynamic polarization and stopping power for an ion beam propagating through a two-component plasma,which is simultaneously irrad...
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