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[期刊论文] 作者：Qiang Wu,Yanli Li,Yushu Yang,Y,
来源：微电子制造学报 年份：2019
With the introduction of EUV lithography,the photolithographic process in 5 nm logic process can be simplified to use mostly single exposure method.In a typical...
[期刊论文] 作者：Yushu Yang,Yanli Li,Qiang Wu,J,
来源：微电子制造学报 年份：2020
5 nm logic process is the current leading-edge technology which is under development in world-wide leading foundries.In a typical 5 nm logic process,the Fin pit...
[会议论文] 作者：Kui HU,Guangjie CHEN,Jianshuang TAO,Yushu YANG,
来源：The 23rd International Diatom Symposium (第23届国际硅藻大会) 年份：2014
Shallow lake ecosystem is known to be sensitive to the forcing of multiple environmental stressors, including eutrophication, hydrological fluctuation and clima...
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