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[期刊论文] 作者：Du Liqun,Zhang Benzhuang,Liu Y,
来源：纳微快报：英文版 年份：2010
The volume expansion of SU-8 resist brings serious dimensional errors to electroformed structures.Two approaches have been proposed to reduce resist distortions...
[期刊论文] 作者：Du Liqun,Zhang Benzhuang,Liu Y,
来源：纳微快报（英文） 年份：2010
The volume expansion of SU-8 resist brings serious dimensional errors to electroformed structures. Two approaches have been proposed to reduce resist distortion...
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