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The characteristics of a collisional dual frequency sheath over an electrode with a cylindrical hole
[会议论文] 作者：Zhong-Ling Dai,Chuan-Sheng Liu,You-Nian Wang,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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[会议论文] 作者：Sai-Qian Zhang,Zhong-Ling Dai,You-Nian Wang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
A two-dimensional profile evolution of a Si trench is simulated in a radio frequency capacitively coupled plasma (rf-CCP) with a hybrid model by considering sputtering,ion-enhanced etching and deposit...
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