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[会议论文] 作者：Chuang Huang,Di Chen,Xiangmeng Jing,Xiang Chen,Jingquan Liu,Jun Zhu,Wenjie Wei,Zeyong Wei,Hongqiang Li,
来源：中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th 年份：2008
As the development of Micro Electromechanical Systems (MEMS),decreasing the components size becoming more and more important.Especially for RF-MEMS,the RF components are normally larger than other par...
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