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,Polar Dependence of Threading Dislocation Density in GaN Films Grown by Metal-Organic Chemical Vapo
[期刊论文] 作者:Zhi-Yu Lin,Zhi-Bin Chen,Jin-Cheng Zhang,Sheng-Rui Xu,Teng Jiang,Jun Luo,Li-Xin Guo,Yue Hao,
来源:中国物理快报(英文版) 年份:2018
We investigate the threading dislocation (TD) density in N-polar and Ga-polar GaN films grown on sapphire substrates by metal-organic chemical vapor deposition....
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