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[会议论文] 作者：Xiao Di Liu,Xiang Liu,CHIA YU LEE,Li Mei Zeng,Jian Xin Xie,Yi Feng Yang,Dong Luo,Xiang Yong Kong,Cong,
来源：中国真空学会2016学术年会 年份：2016
Higher Ion and lower Ioff are eagerly required by gate on array(GOA)technology to guarantee its function.Different SiH4/NH3 ratio in plasma enhanced silicon nitride deposition over G8.5 dummy glass is...
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