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[会议论文] 作者：Bin Li,Hong Li,Huihui Wang,Zhipeng Chen,Wandong Liu,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
The plasma absorption probe (PAP) has been proposed for measuring electron density distribution in processing plasmas by using the characteristic of the sur...
[会议论文] 作者：Zhipeng Chen,Hong Li,Huihui Wang,Bin Lin,Song Geng,Chen Luo,Qiuyan Liu,Lei Feng,Wan-Dong Liu,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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