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[期刊论文] 作者:路险峰,李金钗,郭怀喜,张志宏,叶明生,
来源:中国物理快报(英文版) 年份:2002
CNx thin films were prepared using low pressure plasma enhanced chemical vapour deposition, and then bom-barded by low-energy N+2. The compositions before and a...
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