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[期刊论文] 作者：JiaxinGu,JieLiu,ZiqiBai,HanWang,XinyuCheng,GuanyuLi,MenghuaZhang,XinxinLi,QiShi,MinXiao,XiaoshunJiang,
来源：PhotonicsResearch 年份：2021
We demonstrate the fabrication of ultrahigh quality (Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma (ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as...
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